Test Grating for X-, Y- and Z-direction 55 kHz Titanium Roughness Sample

Titanium Roughness Sample

Each position also has an additional centre recess to avoid any contact with the grid support area and the block

Polished 1

It replaces the previous #607-STM Grating Replica with 463nm pitch

Variety pack contains: 4 MESP-V2 probes

Test Grating for X-, Y- and Z-direction 55 kHz Titanium Roughness SampleDESCRIPTION The TG3D 3000 20 test grating with its truly 3 Dimensional structure is intended for simultaneous calibration in X , Y and Z direction, lateral calibration of SPM scanners and detection of any lateral nonlinearity, hysteresis, creep and cross coupling effects. Structure: Si wafer with SiO2 layer for grating Pattern type: 3 Dimensional array of small squares Height: 20 1. 5nm Square size: 1. 5 0. 15m Period: 3 0. 05m Chip size: 5 x 5 x 0.